Sb₂Te₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Sb₂Te₃ films returned 2 record(s).

Number	Title
1	Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor
2	Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon

Sb2Te3 Plasma Enhanced Atomic Layer Deposition Film Publications