Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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C Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing C films returned 3 record(s).

NumberTitle
1Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
2The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology
3Atomic Layer Deposition of Nanolayered Carbon Films