TiCN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing TiCN films returned 2 record(s).

Number	Title
1	Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications
2	Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases