CuO_x Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing CuO_x films returned 2 record(s).

Number	Title
1	Radical Enhanced Atomic Layer Deposition of Metals and Oxides
2	Plasma-Enhanced Atomic Layer Deposition of p-Type Copper Oxide Semiconductors with Tunable Phase, Oxidation State, and Morphology

CuOx Plasma Enhanced Atomic Layer Deposition Film Publications