AlInN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlInN films returned 3 record(s).

Number	Title
1	Atomic layer epitaxy for quantum well nitride-based devices
2	Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
3	Perspectives on future directions in III-N semiconductor research