Y₂O₃ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Y₂O₃ films returned 7 record(s).

Number	Title
1	Study of Y₂O₃ Thin Film Prepared by Plasma Enhanced Atomic Layer Deposition
2	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
3	Atomic layer deposition of Y₂O₃ thin films with a high growth per cycle by Ar multiple boost injection
4	Radical-enhanced atomic layer deposition of Y₂O₃ via a beta-diketonate precursor and O radicals
5	Controlled erbium incorporation and photoluminescence of Er-doped Y₂O₃
6	Effects of carbon contaminations on Y₂O₃-stabilized ZrO₂ thin film electrolyte prepared by atomic layer deposition for thin film solid oxide fuel cells
7	Er coordination in Y₂O₃ thin films studied by extended x-ray absorption fine structure

Y2O3 Plasma Enhanced Atomic Layer Deposition Film Publications