Ir(acac)₃, Iridium acetylacetonate, Iridium pentanedione, CAS# 15635-87-7

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 4 record(s).

Number	Title
1	Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates
2	Exploiting atomic layer deposition for fabricating sub-10nm X-ray lenses
3	Systematic efficiency study of line-doubled zone plates
4	High-resolution, high-aspect-ratio iridium-nickel composite nanoimprint molds