Inductively coupled plasma sources from Plasma ALD, LLC.


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Thermal Conductivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Thermal Conductivity returned 2 record(s).

NumberTitle
1Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
2Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction