TCR, Temperature Coefficient of Resistivity Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing TCR, Temperature Coefficient of Resistivity returned 4 record(s).

Number	Title
1	Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
2	Electrical and structural properties of conductive nitride films grown by plasma enhanced atomic layer deposition with significant ion bombardment effect
3	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4	Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H₂ + 95% N₂) plasma