Oxidation Resistance Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Oxidation Resistance returned 3 record(s).

Number	Title
1	Ti-Al-N Thin Films Prepared by the Combination of Metallorganic Plasma-Enhanced Atomic Layer Deposition of Al and TiN
2	Characteristics of Tungsten Carbide Films Prepared by Plasma-Assisted ALD Using Bis(tert-butylimido)bis(dimethylamido)tungsten
3	Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes