Trapped Positive Charge-Density Change Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Trapped Positive Charge-Density Change returned 4 record(s).

Number	Title
1	Electrical Properties of Atomic Layer Deposition HfO₂ and HfO_xN_y on Si Substrates with Various Crystal Orientations
2	HfO₂/HfO_xN_y/HfO₂ Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer
3	Trapped charge densities in Al₂O₃-based silicon surface passivation layers
4	Thermal Stability of ALD HfO₂ Thin Films and Interfacial Layers on the Oxynitride Underlayer Formed Using Remote Plasma