Dispersion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Dispersion returned 5 record(s).

Number	Title
1	Innovative remote plasma source for atomic layer deposition for GaN devices
2	Interface engineering of an AlNO/AlGaN/GaN MIS diode induced by PEALD alternate insertion of AlN in Al₂O₃
3	A comparison between HfO₂/Al₂O₃ nano-laminates and ternary Hf_xAl_yO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
4	Interfacial and electrical properties of Al₂O₃/HfO₂ bilayer deposited by atomic layer deposition on GeON passivated germanium surface
5	A comparative study of AlN and Al₂O₃ based gate stacks grown by atomic layer deposition on InGaAs