Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Substrate Temperature Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Substrate Temperature returned 3 record(s).

NumberTitle
1Al2O3/SiNx-Stacks at Increased Temperatures: Avoiding Blistering During Contact Firing
2Comparative study of thermal and plasma enhanced atomic layer deposition of aluminum oxide on graphene
3Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN