Frequency Dispersion Plasma Enhanced Atomic Layer Deposition Publications

Your search for plasma enhanced atomic layer deposition publications discussing Frequency Dispersion returned 4 record(s).

Number	Title
1	Structural and Electrical Analysis of Thin Interface Control Layers of MgO or Al₂O₃ Deposited by Atomic Layer Deposition and Incorporated at the high-k/III-V Interface of MO₂/In_xGa_1-xAs (M = Hf\|Zr, x = 0\|0.53) Gate Stacks
2	A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al₂O₃ on GaN based metal oxide semiconductor capacitor
3	Effect of NH₃ plasma passivation on the electrical characteristics of a nanolaminated ALD HfAlO on InGaAs MOS capacitor
4	Interfacial Self-Cleaning during PEALD HfO₂ Process on GaAs Using TDMAH/O₂ with Different (NH₄)₂S Cleaning Time