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The Plasma Enhanced Atomic Layer Deposition Publication Database is developed and maintained by Plasma ALD, LLC, a developer and supplier of inductively coupled plasma (ICP) sources for plasma-enhanced atomic layer deposition (PEALD), atomic layer etch (ALE), thin-film etching, surface cleaning, surface modification, and research plasma systems.

Our ICP sources are designed for integration with existing ALD and vacuum-processing equipment. Plasma ALD also provides plasma-source integration, process-development, and troubleshooting assistance based on decades of experience with low-pressure plasma processing and PEALD systems.

Researchers, universities, equipment manufacturers, and laboratories looking for an ICP plasma source or assistance adding plasma capability to a vacuum system can learn more on our Plasma Sources page.

Biofilm prevention on cochlear implants

Type:
Journal
Info:
Cochlear Implants International, Volume 15, Issue 3 (May, 2014), pp. 173-178
Date:
2014-03-28

Author Information

Name Institution
Yael GoldfingerBar Ilan University
Michal NatanBar Ilan University
Chaim N. SukenikBar Ilan University
Ehud BaninBar Ilan University
Jona KronenbergTel Aviv University

Films


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

PDMS

Notes

Cambridge NanoTech Fiji PEALD TiO2 cochlear implant biofilm prevention study.
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