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Infrared Study on Room-temperature Atomic Layer Deposition of TiO2 Using Tetrakis(dimethylamino)titanium and Remote-Plasma Excited Water Vapor

Type:
Journal
Info:
Applied Surface Science Volume 308, 30 July 2014, Pages 328-332
Date:
2014-04-24
DOI:
http://dx.doi.org/10.1016/j.apsusc.2014.04.166

Author Information

Name Institution
Kensaku KanomataYamagata University

Films

Plasma TiO2

Hardware used: Custom
TDMATi, tetrakis(dimethylamido)titanium, titanium dimethylamide, (Me2N)4Ti
CAS#: 3275-24-9
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 25C

Film/Plasma Properties

Characteristic: Surface Reactions
Analysis: IRAS, Infrared Reflection Absorption Spectroscopy
Diagnostic: -

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: JASCO M-220

Substrates

Notes

Low temperature TiO2 PEALD with TDMAT and H2O plasma.
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