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Growth characteristics and film properties of plasma-enhanced and thermal atomic-layer-deposited magnesium oxide thin films prepared using bis(ethylcyclopentadienyl)magnesium precursor

Type:
Journal
Info:
Ceramics International 46 (2020) 10115-10120
Date:
2020-01-01
DOI:
https://doi.org/10.1016/j.ceramint.2020.01.001

Author Information

Name Institution
Wangu KangSeoul National University of Science and Technology
Byung Joon ChoiSeoul National University of Science and Technology
Jeong Hwan HanSeoul National University of Science and Technology

Films

Plasma MgO

Hardware used: Custom Direct Capacitively Coupled Plasma
Bis(ethylcyclopentadienyl)magnesium, (EtCp)2Mg
CAS#: 114460-02-5
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-400C

Thermal MgO

Hardware used: Custom Direct Capacitively Coupled Plasma
Bis(ethylcyclopentadienyl)magnesium, (EtCp)2Mg
CAS#: 114460-02-5
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 200-400C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Film Sense FS-1 MWE

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: GIXRD, Grazing Incidence X-Ray Diffraction
Diagnostic: Rigaku D/Max-2500

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Thermo Scientific K-Alpha

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8000

Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi SU-8000

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: NEC Pelletron 6SDH-2

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Diagnostic: ULVAC PHI Inc., PHI 700

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Agilent 4156B

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent 4284A LCR Meter

Substrates

Silicon
TiN

Notes

1700