Inductively coupled plasma sources from Plasma ALD, LLC.


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Dae-Gyu Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dae-Gyu Yang returned 1 record(s).

NumberTitle
1Electrical Properties of Al2O3 Films Grown by the Electron Cyclotron Resonance Plasma-Enhanced Atomic Layer Deposition (ECR-PEALD) and Thermal ALD Methods