Inductively coupled plasma sources from Plasma ALD, LLC.


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Yen-Ting Chen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yen-Ting Chen returned 1 record(s).

NumberTitle
1Junctionless Gate-All-Around pFETs Using In-situ Boron-Doped Ge Channel on Si