Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Dun Shaobo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dun Shaobo returned 1 record(s).

NumberTitle
1High performance AlGaN/GaN HEMTs with AlN/SiNx passivation