Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Naotaka Noro Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Naotaka Noro returned 2 record(s).

NumberTitle
1Effect of ion energies on the film properties of titanium dioxides synthesized via plasma enhanced atomic layer deposition
2Ion energy control and its applicability to plasma enhanced atomic layer deposition for synthesizing titanium dioxide films