Inductively coupled plasma sources from Plasma ALD, LLC.


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M.A. Martí­nez-Puente Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by M.A. Martí­nez-Puente returned 1 record(s).

NumberTitle
1ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies