Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Sreeprasanth Pulinthanathu Sree Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sreeprasanth Pulinthanathu Sree returned 1 record(s).

NumberTitle
1Plasma enhanced atomic layer deposition of Ga2O3 thin films