Jessica Schneidewind Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jessica Schneidewind returned 4 record(s).

Number	Title
1	Three dimensional ALD of TiO₂ for in-vivo biomedical sensor applications
2	Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
3	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
4	Analysis of nitrogen species in titanium oxynitride ALD films