Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

D. V. Negrov Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. V. Negrov returned 2 record(s).

NumberTitle
1Electron Transport Across Ultrathin Ferroelectric Hf0.5Zr0.5O2 Films on Si
2Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks