Moo-Sung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Moo-Sung Kim returned 3 record(s).

Number	Title
1	Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
2	Conformal Formation of (GeTe₂)_(1-x)(Sb₂Te₃)_x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
3	Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O₂ plasma