Inductively coupled plasma sources from Plasma ALD, LLC.


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Miika Mattinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Miika Mattinen returned 1 record(s).

NumberTitle
1Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100°C through Control of Plasma Chemistry