Inductively coupled plasma sources from Plasma ALD, LLC.


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Sung-Sil Cho Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung-Sil Cho returned 2 record(s).

NumberTitle
1Silicon dioxide deposition behavior via ALD using BTBAS with ozone or O2 plasma
2Study on the resistive switching time of TiO2 thin films