Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Jan Willem Maes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jan Willem Maes returned 2 record(s).

NumberTitle
1Evaluation of plasma parameters on PEALD deposited TaCN
2Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing