Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

J. Pradelles Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by J. Pradelles returned 2 record(s).

NumberTitle
1Spectral analysis of the line-width and line-edge roughness transfer during self-aligned double patterning approach
2Spectral analysis of sidewall roughness during resist-core self-aligned double patterning integration