Inductively coupled plasma sources from Plasma ALD, LLC.


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Wonyong Koh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Wonyong Koh returned 2 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of nickel thin film using bis(1,4-diisopropyl-1,4-diazabutadiene)nickel
2Plasma Enhanced Atomic Layer Deposition of Al2O3 and TiN