Inductively coupled plasma sources from Plasma ALD, LLC.


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Do Hwan Jung Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do Hwan Jung returned 2 record(s).

NumberTitle
1Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
2Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition