Jun-Rae Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jun-Rae Kim returned 2 record(s).

Number	Title
1	Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma
2	Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor