Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Emilie Deloffre Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Emilie Deloffre returned 2 record(s).

NumberTitle
1PEALD ZrO2 Films Deposition on TiN and Si Substrates
2Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing