Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Noel O'Toole Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Noel O'Toole returned 2 record(s).

NumberTitle
1Ultrahigh purity conditions for nitride growth with low oxygen content by plasma-enhanced atomic layer deposition
2Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride