Inductively coupled plasma sources from Plasma ALD, LLC.


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Hidehumi Narita Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hidehumi Narita returned 1 record(s).

NumberTitle
1Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen