Kenichiro Mizohata Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenichiro Mizohata returned 3 record(s).

Number	Title
1	Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
2	Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO₂ Using Carbon Dioxide
3	MANOS performance dependence on ALD Al₂O₃ oxidation source