Bernd Gruska Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bernd Gruska returned 4 record(s).

Number	Title
1	Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al₂O₃-films
2	Capacitance and conductance versus voltage characterization of Al₂O₃ layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
3	Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
4	In situ real-time and ex situ spectroscopic analysis of Al₂O₃ films prepared by plasma enhanced atomic layer deposition