Inductively coupled plasma sources from Plasma ALD, LLC.


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Laurie J. Phillips Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Laurie J. Phillips returned 2 record(s).

NumberTitle
1Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
2Schottky Diodes on ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition