Inductively coupled plasma sources from Plasma ALD, LLC.


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Bernd Garke Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Bernd Garke returned 2 record(s).

NumberTitle
1Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds
2Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon