Inductively coupled plasma sources from Plasma ALD, LLC.


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D. Kuylenstierna Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. Kuylenstierna returned 1 record(s).

NumberTitle
1Effects of Surface Passivation and Deposition Methods on the 1/f Noise Performance of AlInN/AlN/GaN High Electron Mobility Transistors