Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Fabian Koehler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabian Koehler returned 2 record(s).

NumberTitle
1Atomic Layer Deposition of SiN for spacer applications in high-end logic devices
2Challenges in spacer process development for leading-edge high-k metal gate technology