Inductively coupled plasma sources from Plasma ALD, LLC.


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Hyo-Suk Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyo-Suk Kim returned 1 record(s).

NumberTitle
1Growth of amorphous zinc tin oxide films using plasma-enhanced atomic layer deposition from bis(1-dimethylamino-2-methyl-2propoxy)tin, diethylzinc, and oxygen plasma