Tzu-Hsuan Huang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Tzu-Hsuan Huang returned 1 record(s).
| Number | Title |
|---|---|
| 1 | The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition |