Inductively coupled plasma sources from Plasma ALD, LLC.


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Tzu-Hsuan Huang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tzu-Hsuan Huang returned 1 record(s).

NumberTitle
1The Sandwich Structure of Ga-Doped ZnO Thin Films Grown via H2O-, O2-, and O3-Based Atomic Layer Deposition