Inductively coupled plasma sources from Plasma ALD, LLC.


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Eva Schubert Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eva Schubert returned 2 record(s).

NumberTitle
1Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
2Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniques