Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Roseanne Warren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Roseanne Warren returned 3 record(s).

NumberTitle
1ALD titanium nitride on vertically aligned carbon nanotube forests for electrochemical supercapacitors
2ALD titanium nitride coated carbon nanotube electrodes for electrochemical supercapacitors
3ALD ruthenium oxide-carbon nanotube electrodes for supercapacitor applications