Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Gerwin Gelinck Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gerwin Gelinck returned 1 record(s).

NumberTitle
1Atmospheric plasma-enhanced spatial-ALD of InZnO for high mobility thin film transistors