Stéphane Coindeau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Stéphane Coindeau returned 2 record(s).

Number	Title
1	Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications
2	PEALD ZrO2 Films Deposition on TiN and Si Substrates