Inductively coupled plasma sources from Plasma ALD, LLC.


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Nikola Dordevic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Nikola Dordevic returned 1 record(s).

NumberTitle
1Low Dit HfO2/Al2O3/In0.53Ga0.47As gate stack achieved with plasma-enhanced atomic layer deposition