Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Lionel Santinacci Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Lionel Santinacci returned 2 record(s).

NumberTitle
1Highly-Conformal TiN Thin Films Grown by Thermal and Plasma-Enhanced Atomic Layer Deposition
2Atomic Layer Deposition of TiN/Al2O3/TiN Nanolaminates for Capacitor Applications